4-port sorter
Introducing a device with a cassette stage that has 4 ports, compatible with 6 and 8-inch wafers.
This product is a device equipped with a cassette stage with 4 ports and a sorting function based on wafer ID reading. It is capable of splitting from 1 cassette to 3 cassettes and integrating from 3 cassettes to 1 cassette. It can be linked with factory systems to select transfer patterns for each lot. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ Equipped with a sorting function based on wafer ID reading ■ Capable of splitting from 1 cassette to 3 cassettes and integrating from 3 cassettes to 1 cassette ■ Can be linked with factory systems to select transfer patterns for each lot *For more details, please refer to the PDF materials or feel free to contact us.
- 企業：アテル
- 価格：Other
